We have compiled a list of manufacturers, distributors, product information, reference prices, and rankings for Microwave plasma processing equipment.
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Microwave plasma processing equipment - List of Manufacturers, Suppliers, Companies and Products

Microwave plasma processing equipment Product List

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PVA Tepla Corporation Microwave Plasma Treatment Device (for Pre-Processing)

PVA Tepla Corporation Microwave Plasma Treatment Device (for Pre-Processing)

From batch processing equipment equipped with unique wafer transfer machines to sheet processing equipment, they are used in fabs around the world for MEMS and semiconductors.

By exciting high-density plasma with 2.45GHz microwaves and suppressing the kinetic energy of ions, it is possible to achieve damage-free process results. It is designed to accommodate a wide range of applications, including ashing in wafer processes, resist stripping, SU-8 resist ashing for MEMS, descum processing, and surface cleaning and activation of substrates.

  • Ashing device

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PVA Tepla Corporation Microwave Plasma Treatment Device (for Post-Processing)

PVA Tepla Corporation Microwave Plasma Treatment Device (for Post-Processing)

We have a proven track record for customers in OSAT around the world and have established our position with reliable performance.

By generating high-density plasma using microwaves (2.45GHz), highly effective surface treatment becomes possible. Additionally, you can choose from various process forms that cater to your different packaging processes. It is designed for chip packaging, including die attach, wire bonding, flip chip, underfill, and resin sealing, for substrate cleaning and surface activation.

  • Ashing device

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